This course teachs student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Mciro System Technology)knoweledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) ....
Course Description
This course teaches student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Micro System Technology)knowledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) and simple physical model on accelerator and combdrive actuator will be elaborated to demonstrate the design process. Finally, The student will combine the knowledge learned from the course to design and present their own MEMS device. This course is offered in English.
Textbooks
References
Teaching Method
| ♠ | Lectures, CAD software hand on practice, presentations |
Syllabus
Tentative Outline for Micro System Design:
